Chemical Mechanical Polishing

The chemical-mechanical polishing (CMP) hangata e ameha ka ho hlahisa libaka tse boreleli ka karabelo ea lik'hemik'hale, haholo-holo e sebetsa indastering ea tlhahiso ea semiconductor.Lonnmeter, moqapi ea tšeptjoang ea nang le boiphihlelo ba lilemo tse fetang 20 tsa ho lekanya mahloriso a inline, o fana ka boemo ba boemo bo holimo.non-nuclear density metresle lisensara tsa viscosity ho rarolla mathata a tsamaiso ea slurry.

Bohlokoa ba Boleng ba Slurry le Boitsebelo ba Lonnmeter

K'hemik'hale ea polishing slurry ke mokokotlo oa ts'ebetso ea CMP, e khethollang ho tšoana le boleng ba libaka. Boima bo sa tsitsang ba slurry kapa viscosity e ka lebisa ho bofokoli bo kang li-micro-scratches, ho tlosoa ha thepa e sa lekaneng, kapa ho koala liphahlo, ho senya boleng ba li-wafer le ho eketsa litšenyehelo tsa tlhahiso. Lonnmeter, moetapele oa lefats'e oa litharollo tsa litekanyo tsa indasteri, o sebetsa ka ho khetheha ho lekanya seretse se kahare ho netefatsa ts'ebetso e nepahetseng ea slurry. Ka rekoto e netefalitsoeng ea ho fana ka li-sensor tse tšepahalang, tse nepahetseng haholo, Lonnmeter e sebelisane le bahlahisi ba etelletseng pele ba semiconductor ho matlafatsa taolo ea ts'ebetso le ts'ebetso e ntle. Limithara tsa bona tsa slurry density metres le viscosity sensors li fana ka datha ea nako ea nnete, e nolofalletsang litokiso tse nepahetseng ho boloka botsitso le ho fihlela litlhoko tse thata tsa tlhahiso ea semiconductor ea sejoale-joale.

Ho feta lilemo tse mashome a mabeli tsa boiphihlelo ba ho lekanya mahloriso a inline, a tšeptjoang ke lifeme tse holimo tsa semiconductor. Li-sensor tsa Lonnmeter li etselitsoe ho kopanya ka mokhoa o se nang moeli le tlhokomelo ea zero, ho fokotsa litšenyehelo tsa ts'ebetso. Litharollo tse entsoeng ho finyella litlhoko tse khethehileng tsa ts'ebetso, ho netefatsa lihlahisoa tse phahameng tsa liphaephe le ho lumellana.

Seabo sa ho Pholefatsa ka Mechini ea Lik'hemik'hale ho Tlhahiso ea Semiconductor

Chemical mechanical polishing (CMP), eo hape e bitsoang planarization ea lik'hemik'hale, ke lejoe la motheo la tlhahiso ea semiconductor, e thusang ho theha libaka tse bataletseng, tse se nang sekoli bakeng sa tlhahiso e tsoetseng pele ea chip. Ka ho kopanya etching ea lik'hemik'hale le abrasion ea mochini, ts'ebetso ea CMP e netefatsa ho nepahala ho hlokahalang bakeng sa lipotoloho tse kopantsoeng tse nang le mekhahlelo e mengata ho li-node tse ka tlase ho 10nm. The lik'hemik'hale mechanical polishing slurry, e entsoeng ka metsi, lik'hemik'hale tsa lik'hemik'hale, le likaroloana tsa abrasive, li sebelisana le pampiri ea ho bentša le sephaphatha ho tlosa thepa ka mokhoa o ts'oanang. Ha meralo ea semiconductor e ntse e fetoha, ts'ebetso ea CMP e tobane le ho rarahana ho ntseng ho eketseha, e hlokang taolo e tiileng holim'a thepa e thellang ho thibela likoli le ho fihlela liphaephe tse boreleli, tse betliloeng tse batloang ke Semiconductor Foundries and Materials Suppliers.

Ts'ebetso e bohlokoa bakeng sa ho hlahisa li-chips tsa 5nm le 3nm tse nang le bofokoli bo fokolang, tse netefatsang libaka tse bataletseng bakeng sa ho beoa ka nepo ha likarolo tse latelang. Esita le ho se lumellane ho fokolang ho ka lebisa ho rework e theko e boima kapa tahlehelo ea lihlahisoa.

Mathata a ho hlokomela Thepa ea Slurry

Ho boloka sets'oants'o sa slurry le viscosity e tsitsitseng ts'ebetsong ea ho bentša ka mochini oa lik'hemik'hale ho na le mathata. Lintho tse nang le seretse li ka fapana ka lebaka la lintho tse kang lipalangoang, ho hlapolloa ka metsi kapa hydrogen peroxide, ho se kopane ho sa lekaneng, kapa ho senyeha ha lik'hemik'hale. Mohlala, li-particle tse lutseng ka har'a li-slurry totes li ka baka letsoalo le phahameng ka tlase, e leng se lebisang ho polishing e sa tšoaneng. Mekhoa ea khale ea ho beha leihlo joalo ka pH, bokhoni ba ho fokotsa oxidation (ORP), kapa conductivity hangata ha e lekane, kaha ba hloleha ho bona liphetoho tse poteletseng sebopehong sa slurry. Meeli ena e ka fella ka bofokoli, litefiso tse fokotsehileng tsa ho tlosoa, le ho eketseha ha litšenyehelo tse sebelisoang, ho beha likotsi tse kholo ho baetsi ba lisebelisoa tsa semiconductor le bafani ba litšebeletso tsa CMP. Liphetoho tse hlophisitsoeng nakong ea ho sebetsana le ho fana li ama ts'ebetso. Li-node tsa sub-10nm li hloka taolo e matla holim'a bohloeki ba seretse le ho nepahala ha motsoako. pH le ORP li bonts'a phapang e nyane, ha conductivity e fapana ho ea ka botsofali bo bobebe. Thepa e sa tsitsang ea li-slurry e ka eketsa litekanyetso tsa sekoli ho fihla ho 20%, ho latela lithuto tsa indasteri.

Li-Sensors tsa Inline tsa Lonnmeter bakeng sa Tlhokomelo ea Nako ea 'Nete

Lonnmeter e sebetsana le liqholotso tsena ka limithara tsa eona tse tsoetseng pele tse se nang nyutlelie leli-sensor tsa viscosity, ho kenyelletsa mitha ea viscosity inline bakeng sa litekanyo tsa in-line viscosity le ultrasonic density meter bakeng sa nako e le 'ngoe ea slurry density le viscosity monitoring. Li-sensor tsena li etselitsoe ho hokahana ka mokhoa o se nang moeli lits'ebetsong tsa CMP, tse nang le likhokahano tsa maemo a indasteri. Litharollo tsa Lonnmeter li fana ka ts'epo ea nako e telele le tlhokomelo e tlase bakeng sa kaho ea eona e matla. Lintlha tsa nako ea 'nete li thusa basebelisi ho lokisa metsoako ea slurry hantle, ho thibela likoli, le ho ntlafatsa ts'ebetso ea pholishe, ho etsa hore lisebelisoa tsena e be tsa bohlokoa bakeng sa Bahlahisi ba Lisebelisoa tsa Tlhahlobo le Teko le Bafani ba Lisebelisoa tsa CMP.

Melemo ea Tlhokomelo e Tsoelang Pele bakeng sa Ntlafatso ea CMP

Ho beha leihlo nako le nako ka lisensara tsa Lonnmeter ho fetola mokhoa oa ho bentša ka mokhoa oa lik'hemik'hale ka ho fana ka lintlha tse ka sebelisoang le ho boloka litšenyehelo. Tekanyo ea nako ea 'nete ea slurry density and viscosity monitoring e fokotsa likoli tse kang mengoapo kapa ho bentša ho feta tekano ka 20%, ho latela litekanyetso tsa indasteri. Ho hokahana le Sistimi ea PLC ho thusa ho etsa dosing le taolo ea ts'ebetso, ho netefatsa hore thepa ea slurry e lula ka har'a mekhahlelo e nepahetseng. Sena se lebisa phokotsong ea 15-25% ea litšenyehelo tse ka sebelisoang, ho fokotsa nako ea ho phomola, le ho ntlafala ho ts'oanang ha liphaephe. Bakeng sa Bafani ba Litšebeletso tsa Semiconductor le Bafani ba Litšebeletso tsa CMP, melemo ena e fetolela tlhahiso e ntlafetseng, phaello e phahameng ea phaello, le ho latela litekanyetso tse kang ISO 6976.

Lipotso Tse Tloaelehileng Mabapi le Tlhokomelo ea Slurry ho CMP

Ke hobane'ng ha tekanyo ea slurry density e le bohlokoa bakeng sa CMP?

Tekanyo ea slurry density e netefatsa kabo e ts'oanang ea likaroloana le ho ts'oana ha motsoako, ho thibela mefokolo le ho ntlafatsa litekanyetso tsa ho tlosoa ts'ebetsong ea ho belisoa ha lik'hemik'hale. E ts'ehetsa tlhahiso ea boleng bo holimo ea li-wafer le ho latela maemo a indasteri.

Tlhokomelo ea viscosity e ntlafatsa katleho ea CMP joang?

Tlhokomelo ea viscosity e boloka phallo e tsitsitseng ea slurry, e thibela litaba tse joalo ka ho koala liphahlo kapa ho belisoa ho sa tšoaneng. Lisensara tsa inline tsa Lonnmeter li fana ka datha ea nako ea nnete ho ntlafatsa ts'ebetso ea CMP le ho ntlafatsa chai ea li-wafer.

Ke eng e etsang hore limithara tse sehlohlolong tsa Lonnmeter tseo e seng tsa nyutlelie li ikhetha?

Limithara tsa slurry density metres tsa Lonnmeter tseo e seng tsa nyutlelie li fana ka litekanyo tsa ho teteana ka nako e le 'ngoe le viscosity ka ho nepahala ho phahameng le tlhokomelo ea lefela. Moralo oa bona o matla o netefatsa ho ts'epahala maemong a boima a ts'ebetso ea CMP.

Tekanyo ea nako ea 'nete ea slurry density le ho lekola viscosity li bohlokoa bakeng sa ho ntlafatsa ts'ebetso ea ho belisoa ha mochini oa lik'hemik'hale tlhahisong ea li-semiconductor. Lonnmeter's non-nuclear density metres le viscosity sensors li fana ka Baetsi ba Semiconductor Equipment, CMP Consumables Suppliers, le Semiconductor Foundries ka lisebelisoa tsa ho hlola mathata a taolo ea slurry, ho fokotsa likoli le litšenyehelo tse tlase. Ka ho fana ka lintlha tse nepahetseng, tsa nako ea 'nete, litharollo tsena li ntlafatsa ts'ebetso ea ts'ebetso, li netefatsa ts'ebetso, le ho khanna phaello 'marakeng oa tlholisano oa CMP. EtelaWebosaete ea Lonnmeterkapa ikopanye le sehlopha sa bona kajeno ho fumana hore na Lonnmeter e ka fetola tšebetso ea hau ea ho bentša ka mochini oa lik'hemik'hale joang.

Nka Khato Joale

Nako ea poso: Jul-22-2025